Nano-imprinting
Master Mold, Stamp, Replication
NIL Technology ApS was established in Copenhagen, Denmark in 2006 and offers a wide range of products and services related to nanoimprinting.

Custom master mold

・Manufacturing masters of micro/nano structures made of Si, Qz, Ni, and Fe
・Specialties: diffractive optical elements, metalens, master for AR/MR
・EBL, DUV lithography, laser direct drawing + dry etch & Deposition process


Standard Working Mold : example – Slanted Grating pattern

・Hard resin structure on 100mmφ glass wafer (wafer thickness 1,000um±25um)
・Slanted grid pattern (20X20mm in center of wafer) slanted in one or both directions.
・500nm period, 325±15nm Gap, Line width 175±15nm, Grating height 400±10nm, Tilting angle 30±2°


Integrated service = Design to Replication(example: Optical element)

Diffractive Optical Elements

・High accuracy
Multiple levels (up to 16)
・Up to 200 mm wafers
Meta Optical Elements

・Flat lenses made by meta-structures (Complex nanostructures).
・Both 1M and 2M lenses are available (1- and 2-metasurfaces, respectively)
Blazed Gratings

・Flexibility and precision, down to 200nm period.
・Low optical loss due to small anti-blaze, low surface roughness (RMS < 2nm)
Slanted Gratings

・High uniformity, flat bottom of the trench, tunable tapering, low roughness (RMS < 2nm)　
・Distinct shape
Microlens Array

・High accuracy spherical and aspherical MLA


Maker
NIL Technology ApS
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